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- gwdlthermo@gwdl.com
The double-layer CVD sliding horizontal tube electric furnace is designed for advanced CVD processes, offering precise temperature control and efficient material deposition.
sequence Number | name | Specifications | Material | quantity | Remark |
| 1 | 130 Furnace Assembly | 3 Temperature Zone / Maximum Temperature 1100℃ Each temperature zone is 300mm long / No interlayer. | Aluminum silicate | 2 sets | Compatible with 130mm outer diameter quartz tube Add a 30mm diameter furnace plugs at both ends of the bore |
| 3 | 130 Preheating Furnace Assembly | 1. Temperature Zone/ Preheating Furnace Temperature Zone Length 100mm, temperature 300-400℃ | Aluminum silicate | 2 sets | Compatible with 130mm outer diameter quartz tube Add a 30mm diameter furnace plugs at both ends of the bore |
| 3 | 130 Furnace Shell Components | Compatible with 130mm outer diameter quartz tube | Q235 | 2 sets | Sheet metal processing Powder coated 9016 traffic white |
| 4 | 130 Preheat Furnace shell assembly | Compatible with 130mm outer diameter quartz tube | Q235 | 2 sets | Sheet metal processing Powder coated 9016 traffic white |
| 5 | Quartz tube | Outer diameter Ø130mm | quartz | 2 roots | Estimated length: 3000mm |
| 6 | 130 Water Cooling Flange assembly | Compatible with 130mm outer diameter quartz tube | SUS 304 | 4 sets | |
| 7 | 30 Flange Assembly | Compatible with 30mm outer diameter quartz tubes | SUS 304 | 4 sets |
| Item | |||||
| 8 | Slide rail slider | 3500mm long slide rail / with 8 sliders | SUJ2 | 4 sets | |
| 9 | vacuum pump | 2 units | |||
| 10 | thermocouple | K type | 8 sticks | ||
| 11 | touchscreen | Screen box and mounting bracket | Kunlun Tongtai | 2 | Installable on profiles |
| 12 | Temperature controller | Yu Dian | 8 pieces | ||
| 13 | Filter | 2 | |||
| 14 | chiller | 1 unit | Compressor with pressure | ||
| 15 | PLC components | Independent electrical box, Siemens S7-200 basic version, 24V power supply, etc. | 2 sets | The dimensions are designed based on the width of the bracket to facilitate hanging installation on both the upper and lower levels. Place one set on each side | |
| 16 | pressure gauge | 2 | |||
| 17 | Angle valve | Stainless steel | 4 | ||
| 18 | bellows | Connects to the KF25 interface, with accompanying card hoop | 2 roots | Length depends on height above the ground Principle of Proximity | |
| 11 | countertop | 1750x700x2 (Length x Width x Thickness) | SUS 304 | 6 | |
| 10 | Profile bracket | 3500x700x2300 (Length x Width x Height) | A6063-T5 | 1 set | Place one set on each of the upper and lower floors stove |
| 11 | Tank Chains | Used in conjunction with the furnace for sliding. | 2 roots |
